With this fully updated second edition, readers will gain a detailed understanding of the physics and applications of modern X-ray and EUV radiation sources. Taking into account the most recent ...
Although ultraviolet (UV) light is widely known as ... 122-200 Ly-a Lyman-alpha 121.6 VUV Vacuum ultraviolet < 200 EUV Extreme ultraviolet 10-121 THIS DEFINITION IS FOR PERSONAL USE ONLY.
Each low-numerical aperture (NA) extreme ultraviolet (EUV) lithography system costs over US$100 million, making it one of the most expensive semiconductor manufacturing tools in history.