Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...
With this fully updated second edition, readers will gain a detailed understanding of the physics and applications of modern X-ray and EUV radiation sources. Taking into account the most recent ...
Although ultraviolet (UV) light is widely known as ... 122-200 Ly-a Lyman-alpha 121.6 VUV Vacuum ultraviolet < 200 EUV Extreme ultraviolet 10-121 THIS DEFINITION IS FOR PERSONAL USE ONLY.
Each low-numerical aperture (NA) extreme ultraviolet (EUV) lithography system costs over US$100 million, making it one of the most expensive semiconductor manufacturing tools in history.
This illustration shows the complex interior of an ASML EUV machine - the extreme ultraviolet light is in purple Microchips are made by building up complex patterns of transistors, or miniature ...
NASA's Great Observatories—the Hubble, Spitzer, Compton, and Chandra space telescopes—have revealed some amazing things about ...
Etching seems like such an old-fashioned technique (for a time it was also an Olympic competition) that you don’t normally ...
Data processing for NASA's Solar Dynamics Observatory and IRIS probe are down for a while, thanks to a burst water pipe in a ...