This is the frontier of microfabrication—the process of making microscopic structures that are crucial for the operation of everything from computer chips to medical devices. Traditionally ...

All the process systems in the MFF have standard operating procedures (SOPs). These SOPs are very detailed documents that describe step-by-step the procedure regarding equipment operation or chemical ...

Photolithography is a semiconductor manufacturing process that is used to remove parts of a thin-film selectively, or to etch away the majority of a flat substrate. Typically, this microfabrication ...