Sputtering - DC A PVD process using plasma (glow-discharge) to ionize or knock (sputter) atoms off a target (source material) and deposit the positively charged ions on a substrate or wafer. The DC ...

PVD techniques, such as sputtering and thermal evaporation, involve the physical vaporization of a target material and its subsequent condensation onto a substrate to form a thin film. PVD methods ...