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  1. Endura Volta Cobalt CVD - Applied Materials

  2. Endura Volta Cobalt CVD - Applied Materials

  3. Metal-on-metal area-selective deposition-Why cobalt succeeded …

  4. Area-selective chemical vapor deposition of Co for Cu capping …

  5. Area-selective chemical vapor deposition of cobalt from dicobalt ...

  6. Tungsten and cobalt metallization: A material study for MOL …

  7. Chemical Vapor Deposition of Cobalt and Nickel Ferrite Thin …

  8. Electromigration comparison of selective CVD cobalt capping …

  9. Mechanism of Cobalt Bottom-Up Filling for Advanced Node Interconnect ...

  10. Low Temperature, Selective Atomic Layer Deposition of Cobalt Metal ...