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  1. China's SMEE files patent for an EUV chipmaking tool — tool aims …

  2. Chinese chip making shows progress with new EUV patent from …

  3. Chinese company develops 65nm-capable lithography machine

  4. Exclusive - South China Morning Post

  5. China May Be Constructing EUV Lithography Machines on a …

  6. Can China Leapfrog ASML in Its Quest for Semiconductor Self …

  7. China’s lithography gains a glass half full, not half empty

  8. China sets out to develop EUV lithographic ‘cannon’ - Asia Times

  9. Beijing wants its own EUV light source, a key part ... - The China

  10. Huawei EUV Scanner Patent Suggests Sub-7nm Chips for China