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China's SMEE files patent for an EUV chipmaking tool — tool aims …
Chinese chip making shows progress with new EUV patent from …
Chinese company develops 65nm-capable lithography machine …
Exclusive - South China Morning Post
China May Be Constructing EUV Lithography Machines on a …
Can China Leapfrog ASML in Its Quest for Semiconductor Self …
China’s lithography gains a glass half full, not half empty
China sets out to develop EUV lithographic ‘cannon’ - Asia Times
Beijing wants its own EUV light source, a key part ... - The China …
Huawei EUV Scanner Patent Suggests Sub-7nm Chips for China