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  1. Plasma etching - Wikipedia

  2. Plasma Etching - an overview | ScienceDirect Topics

  3. 等离子体刻蚀 - 百度百科

  4. Plasma Etching: A Comprehensive Guide to the Process and

  5. 学术干货丨Plasma etching 处理材料的原理及应用 – 材料牛

  6. Future of plasma etching for microelectronics: Challenges and ...

  7. Plasma etching: principles, mechanisms, application to micro

  8. Plasma Etching - SpringerLink

  9. Introduction to Plasma Etching - Oxford Instruments