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  1. Plasma etching - Wikipedia

  2. 半导体MEMS制造的基本工艺——刻蚀工艺(干法); - 知乎

  3. Plasma Etching - an overview | ScienceDirect Topics

  4. Plasma Etching: A Comprehensive Guide to the Process and

  5. 等离子体刻蚀 - 百度百科

  6. 学术干货丨Plasma etching 处理材料的原理及应用

  7. Future of plasma etching for microelectronics: Challenges and ...

  8. Plasma etching: principles, mechanisms, application to micro