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Plasma etching - Wikipedia
半导体MEMS制造的基本工艺——刻蚀工艺(干法); - 知乎
等离子体刻蚀 - 百度百科
Plasma Etching - an overview | ScienceDirect Topics
Plasma Etching: A Comprehensive Guide to the Process and
学术干货丨Plasma etching 处理材料的原理及应用
How plasma etch works - Quattrone Nanofabrication Facility
Plasma etching: principles, mechanisms, application to micro