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Plasma etching - Wikipedia
Plasma Etching - an overview | ScienceDirect Topics
等离子体刻蚀 - 百度百科
Plasma Etching: A Comprehensive Guide to the Process and
学术干货丨Plasma etching 处理材料的原理及应用 – 材料牛
Future of plasma etching for microelectronics: Challenges and ...
Plasma etching: principles, mechanisms, application to micro
Plasma Etching - SpringerLink
Introduction to Plasma Etching - Oxford Instruments