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  1. Plasma中离子鞘层产生原理以及鞘层内离子行为 - 知乎

  2. MSc Physics of Advanced Semiconductor Materials - lecture 4

  3. PLASMA RIE

  4. Recent Advances in Reactive Ion Etching and Applications of High ... - MDPI

  5. Understanding Sheath Behavior Key to Plasma Etch - SemiWiki

  6. Reactive Ion Etching (RIE) - SpringerLink

  7. RIE Plasma and ETCH Mechanisms | MRS Online Proceedings …

  8. RIE Plasma and ETCH Mechanisms | MRS Online Proceedings …