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  1. Support for EUV Lithography: Metrology with 13 nm Radiation - PTB

  2. 7.14 EUV-Nanometrology - PTB.de

  3. (PDF) Update on EUV radiometry at PTB - Academia.edu

  4. The EUV metrology program of PTB - ScienceDirect

  5. The EUV metrology program of PTB - ScienceDirect

  6. Metrology with synchrotron radiation at PTB | The European …

  7. High-accuracy EUV metrology of PTB using synchrotron radiation